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熱門搜索:真空幫浦、真空泵浦、VACUUM PUMPS、真空輸送機、真空手套箱、真空搬運機
地址：台灣 236 新北巿
郵編：23673TMP-803 Series
SHIMADZU
| Turbo molecular pump | TMP-1003LM | TMP-1003LMC | TMP-1003M | TMP-1003MC | |
|---|---|---|---|---|---|
| Inlet flange | VG200 / ICF253 / ISO200B | ||||
| Outlet flange | KF40 | ||||
| Cooling method | Water | Cooling fan | |||
| Ultimate pressure (after baking) (Note1) | 10-9 Pa order | 10-8 Pa order | 10-9 Pa order | 10-8 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 400 Pa | 1.3 Pa | |||
| Maximum allowable outlet pressure | 665 Pa | 40 Pa | |||
| Pumping speed (Note 2) | N2 | 1080 L/s | |||
| He | 930 L/s | ||||
| H2 | 790 L/s | ||||
| Compression ratio | N2 | 1 x 109 | |||
| He | 8 x 104 | ||||
| H2 | 4 x 103 | ||||
| Rated speed | 35000 rpm | ||||
| Start-up time | 5 minutes or less | ||||
| Mounting position | In any desired direction | ||||
| Bake-out temperature at an inlet flange | 120 degrees C. or less | ||||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-pea) | ||||
| Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||||
| Recommended pumping speed of backing pump in case of gas purge | 500 L/min or more | ||||
| Environmental Temperatures | 0 to 40 degrees C. | ||||
| Admissible ambient magnetic field | Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow rate | 1 to 3 L/min | - | ||
| Pressure | 0.2 to 0.5 MPa | ||||
| Temperature | 5 to 30 degrees C. | ||||
| Mass | 32 kg or less | ||||
| Power supply unit | EI-R04M | |
|---|---|---|
| Battery | Not Necessary | |
| Exchangeable compatibility | The control cable and the motor cable are interchangeable between any pump and power supply unit. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Communication | Contact | REMOTE (MR-34) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING |
| Serial | Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6) Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6) | |
| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) |
| Relative humidity | 40 to 80 %RH | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) |
| Maximum power | 1.0 kVA | |
| Mass | 8 kg |
| Turbo molecular pump | TMP-1003LM | TMP-1003LMC | TMP-1003M | TMP-1003MC | |
|---|---|---|---|---|---|
| Inlet flange | VG200 / ICF253 / ISO200B | ||||
| Outlet flange | KF40 | ||||
| Cooling method | Water | Cooling fan | |||
| Ultimate pressure (after baking) (Note1) | 10-9 Pa order | 10-8 Pa order | 10-9 Pa order | 10-8 Pa order | |
| Maximum allowable inlet pressure (N2 continuous exhaust) | 400 Pa | 1.3 Pa | |||
| Maximum allowable outlet pressure | 665 Pa | 40 Pa | |||
| Pumping speed (Note 2) | N2 | 1080 L/s | |||
| He | 930 L/s | ||||
| H2 | 790 L/s | ||||
| Compression ratio | N2 | 1 x 109 | |||
| He | 8 x 104 | ||||
| H2 | 4 x 103 | ||||
| Rated speed | 35000 rpm | ||||
| Start-up time | 5 minutes or less | ||||
| Mounting position | In any desired direction | ||||
| Bake-out temperature at an inlet flange | 120 degrees C. or less | ||||
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-pea) | ||||
| Recommended flow rate of purge gas | 20 to 30 mL/min (Note 3) | ||||
| Recommended pumping speed of backing pump in case of gas purge | 500 L/min or more | ||||
| Environmental Temperatures | 0 to 40 degrees C. | ||||
| Admissible ambient magnetic field | Radial direction | 3 mT | |||
| Axial direction | 15 mT | ||||
| Water | Flow rate | 1 to 3 L/min | - | ||
| Pressure | 0.2 to 0.5 MPa | ||||
| Temperature | 5 to 30 degrees C. | ||||
| Mass | 32 kg or less | ||||
| Power supply unit | EI-R04M | |
|---|---|---|
| Battery | Not Necessary | |
| Exchangeable compatibility | The control cable and the motor cable are interchangeable between any pump and power supply unit. | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Communication | Contact | REMOTE (MR-34) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING |
| Serial | Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6) Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6) | |
| Environmental conditions | Temperature | Operation 0 to 45 degrees C. (No dew condensation) |
| Relative humidity | 40 to 80 %RH | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz) |
| Maximum power | 1.0 kVA | |
| Mass | 8 kg |
