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電話:886-2-8076-3000
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聯絡人1:徐建榮
職稱1:銷售經理
行動電話1:0932392460
電子信箱1:sh.vacuum@msa.hinet.net

聯絡人2:林永瑞
職稱2:經理
電子信箱2:jeff@sh-vacuum.com.tw


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首頁 » 產品展示 » SHIMADZU turbomolecular pumps 渦輪分子泵 » 渦輪分子泵 SHIMADZU Turbo Molecular Pump TMP-1503 Series
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渦輪分子泵 SHIMADZU Turbo Molecular Pump TMP-1503 Series

數量:
  • TMP-1503 Serie
  • SHIMADZU
渦輪分子泵 SHIMADZU Turbo Molecular Pump TMP-1503 Series

高泵送吞吐量類型
•最大泵送流量
•優異的耐腐蝕性
•緊湊型電源裝置
•針對反應產物的措施(可選)
•各種監控功能
•已啟用網絡連接
•可變泵速
•降低功耗
•符合主要標準
•無調音
•無電池


高泵送吞吐量類型
真空和工業機械
•最大泵送流量
 
通過緊湊的機身實現高泵送吞吐量。
 
•優異的耐腐蝕性
 
由於在轉子上使用分散電鍍(TMP-4203LMC,TMP-3403LMC),因此耐腐蝕性氣體。具有優異的熱釋放特性的分散電鍍防止了由高泵送量引起的轉子過熱。
TMP-2203LMC和TMP-1303LMC的轉子表面鍍鎳,以防止腐蝕性氣體。
 
•緊湊型電源裝置
 
與Shimadzu之前的型號相比,重量減輕了49%,重量減輕了50%
 
高泵送吞吐量類型
•針對反應產物的措施(可選)
 
添加用於控制加熱器和冷卻水到泵的功能允許其保持在高溫下並防止反應產物積聚在其內部。溫度控制器內置於緊湊型電源單元中。
 
•各種監控功能
 
前面板上的LCD顯示當前,抽速,不平衡量,錯誤和其他信息。配備維護呼叫計時器。
前面板上配有RS-232C端口,以便在泵運行時將操作信息加載到計算機上。如果將條件與正常條件進行比較,您可以在早期階段發現異常情況(由於附著的反應產物引起的背壓增加等)。這有助於保護系統免受問題的影響並使其保持良好狀態。
 
•已啟用網絡連接
 
配備符合RS-232C和RS-485標準的串行通信端口,可以啟動/停止泵,監控運行狀態和加載運行歷史。使用一台計算機可以監控多達32個泵。
使用可選的監控軟件,可以同時監控多個泵。
 
•可變泵速
 
泵速可在25%至100%的範圍內設定,以調節泵的產量。速度設定可應用於腔室壓力的調節。在給定條件下使用時,可以減少電導閥。
 
•降低功耗
 
•符合主要標準
 
CE標誌,TÜV
NRTL(UL61010A-1)
SEMI S2
SEMI F47
SEMI E74
 
•無調音
 
在更換泵電纜時,不需要重新調整電源單元。
 
•無電池
 
在電源故障的情況下,使用再生電力維持磁懸浮,從而減少了觸地軸承的磨損。


Maximum pumping flowrate

High pumping throughput is achieved with a compact body.

• Excellent corrosion resistance

Resistant to corrosive gas because dispersed plating is used on the rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent heat release characteristic prevents overheat of the rotor caused by high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.

• Compact power supply unit

49 % smaller and 50 % lighter as compared to Shimadzu's previous models

High Pumping Throughput Type

• Measures against reaction products (optional)

Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.

• Various monitoring functions

LCD on the front panel displays the current, pumping speed, unbalance amount, errors, and other information. Equipped with a maintenance call timer.
Equipped with a RS-232C port on the front panel so that operation information can be loaded on a computer while the pump is operating. You can find abnormalities (increase of back pressure due to an adhered reaction product, etc.) in early stages if you compare the condition with the normal condition. This helps to protect the system from problems and keep it in good condition.

• Network connection enabled

Equipped with RS-232C and RS-485 compliant serial communication ports, which enables operations to start/stop pumps, monitor operation status, and load operation history. Up to 32 pumps can be monitored using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.

• Variable pump speed

The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.

• Reduced power consumption

• Compliant with major standards

CE marking, TÜV
NRTL (UL61010A-1)
SEMI S2
SEMI F47
SEMI E74

• Tuning-free

Readjustment of the power supply unit is unnecessary during pump cable replacement.

• Battery-less

In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.

 


Standard Specifications

Pump Main Unit
Turbo molecular pump TMP-1503LM TMP-1503LMC
Inlet flange VG250 / ICF305 / ISO250B
Outlet flange KF40
Cooling method Water
Ultimate pressure (after baking)
(Note1)
10-8 Pa order 10-7 Pa order
Maximum allowable Argon gas flow rate 500 mL/min
(Note 2)
800 mL/min
Maximum allowable inlet pressure
(N2 continuous exhaust)
133 Pa
Maximum allowable outlet pressure 270 Pa
Pumping speed
(Note 2)
N2 1500 L/s
He 1200 L/s
H2 800 L/s
Compression ratio N2 6 x 108
He 1 x 104
H2 1 x 103
Rated speed 30300 rpm
Start-up time 7 minutes or less
Mounting position In any desired direction
Bake-out temperature at an inlet flange 120 degrees C. or less
Vibration level (by Shimadzu's method) 0.01 µm or less (0-peak)
Recommended flow rate of purge gas 20 to 30 mL/min (Note 3)
Recommended pumping speed of backing pump in case of gas purge 600 L/min or more
Environmental Temperatures 0 to 40 degrees C.
Admissible ambient
magnetic field
Radial direction 3 mT
Axial direction 15 mT
Water Flow rate 1 to 3 L/min
Pressure 0.2 to 0.5 MPa
Temperature 5 to 30 degrees C.
Mass 42 kg
  • (Note 1)When using a metal gasket at the inlet flange. When using an o-ring gasket, the ultimate pressure is 10-7 Pa order.
  • (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
  • (Note 3)Without a protective net. Pumping speed for N2 is 1380 L/s with a protective net.

 

Power Supply Unit
Power supply unit EI-R04M
Battery Not Necessary
Exchangeable compatibility The control cable and the motor cable are interchangeable between any pump and power supply unit.
Speed variation Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)
Communication Contact

REMOTE (MR-34)

Input : START / STOP / RESET / LOW SPEED

Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING

Serial

Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6)

Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6)

Environmental conditions Temperature Operation 0 to 45 degrees C. (No dew condensation)
Relative humidity 40 to 80 %RH
Input electric power Voltage Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)
Maximum power 1.0 kVA
Mass 8 kg


銷售方式:製造、批發、合作、服務、進口
銷售目標市場:台灣、中國大陸、香港、新加坡
詢價付款方式:T.T. 電匯、L/C 信用狀

競爭特點
多樣設計:旭豪真空科技有限公司提供渦輪分子泵 SHIMADZU Turbo Molecular Pump TMP-1503 Series的多樣化設計
渦輪分子泵 SHIMADZU Turbo Molecular Pump TMP-1503 Series接受進行原廠委託設計製造ODM
渦輪分子泵 SHIMADZU Turbo Molecular Pump TMP-1503 Series接受進行原廠委託代工製造OEM

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