SHIMADZU TMP-V3304LM(F) Turbo Molecular Pump 渦輪分子泵
產品描述
SHIMADZU PUMP
•帶集成電源的TMP
TMP-V3304LM(F)
帶集成電源單元的類型
•緊湊
•節能
•無需安裝電纜或使用控制架
•改善泵送性能
•由於直接輸入交流電源,因此無需單獨供電。
•帶集成電源的TMP
由於直接輸入交流電源,因此無需單獨的電源。
•緊湊,高抽速
在比Shimadzu之前的型號小一個尺寸的車身上實現了高抽速。
•可變泵速
泵速可設定在25%至100%的範圍內。
Standard Specifications
Turbo molecular pump (Note 1) | TMP-V3304LM (F) | |
---|---|---|
Inlet flange | VG300 / ISO320B / VG350 | |
Outlet flange | KF40 | |
Cooling method | Water | |
Ultimate pressure (after baking) | 10-7 Pa order | |
Maximum allowable Argon gas flow rate (Note 2) | 1500 mL/min (Note 3) | |
Maximum allowable inlet pressure (N2 continuous exhaust) (Note 2) | 7 Pa | |
Maximum allowable outlet pressure (N2 continuous exhaust) (Note 2) | 270 Pa | |
Pumping speed (Note 4)(Note 5) | N2 | 3200 L/s |
Ar | 3100 L/s | |
Compression ratio | N2 | 1×109 or more |
He | 1×105 | |
H2 | 6×103 | |
Rated speed | 27600 rpm | |
Start-up time | 16 minutes or less | |
Mounting position | In any desired direction | |
Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | |
Display | LED | POWER / STATUS / ROTATION / NET |
Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
Water | Flow rate | 3 to 4 L/min |
Pressure | 0.2 to 0.4 MPa | |
Temperature | 19 to 30 degrees C. (above dew point) | |
Admissible ambient magnetic field | Radial direction | 3 mT |
Axial direction | 15 mT | |
Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
Maximum power | 1.2 kVA | |
Mass | 94 kg |
銷售方式:製造、批發、合作、服務、進口
銷售目標市場:台灣、中國大陸、香港、新加坡
詢價付款方式:T.T. 電匯、L/C 信用狀
競爭特點
多樣設計:旭豪真空科技有限公司提供SHIMADZU TMP-V3304LM(F) Turbo Molecular Pump 渦輪分子泵的多樣化設計
SHIMADZU TMP-V3304LM(F) Turbo Molecular Pump 渦輪分子泵接受進行原廠委託設計製造ODM
SHIMADZU TMP-V3304LM(F) Turbo Molecular Pump 渦輪分子泵接受進行原廠委託代工製造OEM