SHIMADZU TMP-V2304LM Turbo Molecular Pump 渦輪分子泵
產品描述
SHIMADZU PUMP 渦輪分子泵
TMP-V2304LM
帶集成電源單元的類型
•緊湊
•節能
•無需安裝電纜或使用控制架
•改善泵送性能
•由於直接輸入交流電源，因此無需單獨供電。
•一體化×緊湊型
•緊湊型，帶集成電源裝置
電源單元集成在泵中。
無需安裝電纜或使用控制架
•改善泵送性能
通過應用稀薄氣流分析和結構分析技術實現高泵送效率。
•環保
省電（功耗比以前的型號降低25％
Standard Specifications
| Turbo molecular pump | TMP-V2304LM | |
|---|---|---|
| Inlet flange | VG250 / ISO250B | |
| Outlet flange | KF40 | |
| Cooling method | Water | |
| Ultimate pressure (after baking) | 10-7 Pa order | |
| Maximum allowable Argon gas flow rate (Note 1) | 600 mL/min (Note 2) | |
| Maximum allowable inlet pressure (N2 continuous exhaust) (Note 1) | 4.5 Pa | |
| Maximum allowable outlet pressure (N2 continuous exhaust) (Note 1) | 200 Pa | |
| Pumping speed (Note 3)(Note 4) | N2 | 2100 L/s |
| Ar | 2000 L/s | |
| Compression ratio | N2 | 1×108 or more |
| He | 5×103 | |
| H2 | 9×102 | |
| Rated speed | 33700 rpm | |
| Start-up time | 9 minutes or less | |
| Mounting position | In any desired direction | |
| Vibration level (by Shimadzu's method) | 0.01 µm or less (0-peak) | |
| Recommended pumping speed of backing pump in case of gas purge | 1500 L/min or more | |
| Display | LED | POWER / STATUS / ROTATION / NET |
| Communication | Contact | REMOTE (D-sub 37 pin female, Screw lock size M2.6) Input : START / STOP / RESET / LOW SPEED Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING / CONNECTION |
| Serial | RS-232C / RS-485 (D-sub 9 pin male, Screw lock size M2.6) | |
| Speed variation | Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %) | |
| Water | Flow rate | 3 to 4 L/min |
| Pressure | 0.2 to 0.4 MPa | |
| Temperature | 19 to 30 degrees C. (above dew point) | |
| Admissible ambient magnetic field | Radial direction | 3 mT |
| Axial direction | 15 mT | |
| Input electric power | Voltage | Single phase 200 to 240 VAC ± 10 % (50 / 60 Hz ± 2 Hz) |
| Maximum power | 1.2 kVA | |
| Mass | 56 kg |
- (Note 1)Maximum allowable flow rate, Maximum allowable inlet pressure and Maximum allowable outlet pressure can not be satisfied at same time.
- (Note 2)mL/min : volume flow rate at 0 degrees C., 1 atm. (Compatible with SCCM.)
- (Note 3)Without a protective net. Pumping speed for N2 is 1950 L/s with a protective net.
- (Note 4)Do not use corrosive gas because there is possibility that the pump breaks down by the product material.
銷售方式：製造、批發、合作、服務、進口
銷售目標市場：台灣、中國大陸、香港、新加坡
詢價付款方式：T.T. 電匯、L/C 信用狀
競爭特點
多樣設計：旭豪真空科技有限公司提供SHIMADZU TMP-V2304LM Turbo Molecular Pump 渦輪分子泵的多樣化設計
SHIMADZU TMP-V2304LM Turbo Molecular Pump 渦輪分子泵接受進行原廠委託設計製造ODM
SHIMADZU TMP-V2304LM Turbo Molecular Pump 渦輪分子泵接受進行原廠委託代工製造OEM