渦輪分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300
產品描述
渦輪分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300
組合軸承
•長壽命軸承機構可降低維護成本。
•泵可與小型前級泵組合使用。
•泵可以任何方向安裝。
磁性和陶瓷軸承的組合
專有的阻尼機構用於實現低振動和軸承冷卻功能，另外還提供高可靠性和長使用壽命。
該泵可與小型前級泵結合使用。
渦輪葉片和分子拖曳泵的組合即使在高背壓水平下也能實現超高真空。
如果與小型乾式真空泵（如隔膜泵）結合使用，可以實現超高真空壓力。
泵可以任何方向安裝。
泵單元可以垂直，水平或倒置方向安裝。
Standard Specifications
| Turbo molecular pump model | TMP-B300 | ||
|---|---|---|---|
| Cooling method | Convection | Forced air by cooling fan | |
| Ultimate pressure(note 2) | After baking | −(note 1) | 10-8 Pa order (note 2) |
| Non-baking | 10-6 Pa order | 10-6 Pa order | |
| Pumping speed(note 3) | N2 | 280 L/s | 280 L/s |
| He | 270 L/s | 270 L/s | |
| H2 | 220 L/s | 220 L/s | |
| Compression ratio | N2 | > 1 x 109 | > 1 x 109 |
| He | 7×106 | 7×106 | |
| H2 | 1×105 | 1×105 | |
| Critical backing pressure | 1500 Pa | 1500 Pa | |
| Maximum allowable continuous backing pressure(note 4) | N2 | 100 Pa (ambient < 35°C) | 1000 Pa (ambient 25°C) 930 Pa (ambient 35°C) |
| Maximum allowable gas throughput at continuous pumping | 10 SCCM (ambient 25°C) 4 SCCM (ambient 35°C) | 100 SCCM (ambient 25°C) 40 SCCM (ambient 35°C) | |
| weight | VG, ISO | 6 kg | 6.3 kg |
| ICF | 9 kg | 9.3 kg | |
| Bearing type | Passive magnetic bearing and ceramic bearing | ||
| Inlet flange | VG100, DN100CF, ISO100K | ||
| Outlet port | KF16 | ||
| Rated speed | 60000 rpm | ||
| Stat-up time（up to 80 %） | 3.5 minutes | ||
| Mounting direction | In any desired direction | ||
| Noise [Shimadzu's method](note 5) | ≤ 50 dBA | ||
| Admissible ambient magnetic field | Radial direction | 3 mT | |
| Axial direction | 15 mT | ||
| Input electric power | Voltage | DC24 V ± 5 % | |
| Maximum power | 180 W | ||
- (Note 1)Only pumps equipped with a CF flange and cooling fan can be baked.
- (Note 2)When using a two-stage oil-sealed rotary pump as an auxiliary pump.
- (Note 3)When no protective net is used. Pumping speed for N2 is 260 L/s when a protective net is used.
- (Note 4)Maximum allowable backing pressure for continuous running when gas throughput at inlet port is 0 mL/min
- (Note 5)Measured for the ISO flange model.
銷售方式：製造、批發、合作、服務、進口
銷售目標市場：台灣、中國大陸、香港、新加坡
詢價付款方式：T.T. 電匯、L/C 信用狀
競爭特點
多樣設計：旭豪真空科技有限公司提供渦輪分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300的多樣化設計
渦輪分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300接受進行原廠委託設計製造ODM
渦輪分子泵SHIMADZU Turbo Molecular Pump SHIMADZU PUMP TMP-B300接受進行原廠委託代工製造OEM