Maximum pumping flowrate
High pumping throughput is achieved with a compact body.
• Excellent corrosion resistance
Resistant to corrosive gas because dispersed plating is used on the rotor (TMP-4203LMC, TMP-3403LMC). Dispersed plating with an excellent heat release characteristic prevents overheat of the rotor caused by high pumping throughput.
The surface of the rotor of the TMP-2203LMC and TMP-1303LMC is nickel-plated to protect against corrosive gas.
• Compact power supply unit
49 % smaller and 50 % lighter as compared to Shimadzu's previous models
• Measures against reaction products (optional)
Adding a function for controlling the heater and cooling water to the pump allows it to be kept at a high temperature and prevents the accumulation of reaction products inside it. The temperature controller is built into the compact power supply unit.
• Various monitoring functions
LCD on the front panel displays the current, pumping speed, unbalance amount, errors, and other information. Equipped with a maintenance call timer.
Equipped with a RS-232C port on the front panel so that operation information can be loaded on a computer while the pump is operating. You can find abnormalities (increase of back pressure due to an adhered reaction product, etc.) in early stages if you compare the condition with the normal condition. This helps to protect the system from problems and keep it in good condition.
• Network connection enabled
Equipped with RS-232C and RS-485 compliant serial communication ports, which enables operations to start/stop pumps, monitor operation status, and load operation history. Up to 32 pumps can be monitored using a single computer.
Using optional monitor software, multiple pumps can be monitored simultaneously.
• Variable pump speed
The pump speed can be set within a range from 25 to 100 % to adjust the pump's throughput. Speed setting can be applied to the adjustment of chamber pressure. Conductance valves can be reduced when used under given conditions.
• Reduced power consumption
• Compliant with major standards
CE marking, TÜV
Readjustment of the power supply unit is unnecessary during pump cable replacement.
In the case of a power failure, magnetic levitation is maintained using regenerated power, thus reducing wear of the touchdown bearing.
|Turbo molecular pump||TMP-1503LM||TMP-1503LMC|
|Inlet flange||VG250 / ICF305 / ISO250B|
| Ultimate pressure (after baking) |
|10-8 Pa order||10-7 Pa order|
|Maximum allowable Argon gas flow rate|| 500 mL/min |
| Maximum allowable inlet pressure |
(N2 continuous exhaust)
|Maximum allowable outlet pressure||270 Pa|
| Pumping speed |
|Compression ratio||N2||6 x 108|
|He||1 x 104|
|H2||1 x 103|
|Rated speed||30300 rpm|
|Start-up time||7 minutes or less|
|Mounting position||In any desired direction|
|Bake-out temperature at an inlet flange||120 degrees C. or less|
|Vibration level (by Shimadzu's method)||0.01 µm or less (0-peak)|
|Recommended flow rate of purge gas||20 to 30 mL/min (Note 3)|
|Recommended pumping speed of backing pump in case of gas purge||600 L/min or more|
|Environmental Temperatures||0 to 40 degrees C.|
| Admissible ambient |
|Radial direction||3 mT|
|Axial direction||15 mT|
|Water||Flow rate||1 to 3 L/min|
|Pressure||0.2 to 0.5 MPa|
|Temperature||5 to 30 degrees C.|
|Power supply unit||EI-R04M|
|Exchangeable compatibility||The control cable and the motor cable are interchangeable between any pump and power supply unit.|
|Speed variation||Speed is variable between 25 % and 100 % of the rated speed. (set as 0.1 %)|
Input : START / STOP / RESET / LOW SPEED
Output : ROTATION / ACC. / BRAKE / NORMAL / REMOTE / ALARM / WARNING
Front panel : RS-232C (D-sub 9 pin male, Screw lock size : M2.6)
Rear panel : RS-485 (D-sub 9 pin female, Screw lock size : M2.6)
|Environmental conditions||Temperature||Operation 0 to 45 degrees C. (No dew condensation)|
|Relative humidity||40 to 80 %RH|
|Input electric power||Voltage||Single phase 200 to 240 VAC ± 10 % (50/60 Hz ± 2 Hz)|
|Maximum power||1.0 kVA|